Granted Patent
Utility
US 5,843,237 · App. 08/773,338
Apparatus for manufacturing a semiconductor device having a wafer loading stage with an annular slope
Inventor:
Sang-Jun Chun
Patented Case
View Patent ↗
Granted: Dec 1, 1998
Filed: Dec 26, 1996
Inventor
Sang-Jun Chun
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.