IP Library Granted Patent US 5,843,319
Granted Patent Utility
US 5,843,319 · App. 08/902,072

Positive-working radiation-sensitive mixture

Inventors: Klaus-Juergen Przybilla, Takanori Kudo, Seiya Masuda, Yoshiaki Kinoshita, Natsumi Suehiro, Munirathna Padmanaban, Hiroshi Okazaki, Hajime Endo, Ralph R. Dammel, Georg Pawlowski
Patented Case View Patent ↗
Granted: Dec 1, 1998 Filed: Jul 29, 1997
Inventors
Klaus-Juergen Przybilla
Takanori Kudo
Seiya Masuda
Yoshiaki Kinoshita
Natsumi Suehiro
Munirathna Padmanaban
Hiroshi Okazaki
Hajime Endo
Ralph R. Dammel
Georg Pawlowski
Assignee (at issue)
Hoechst Japan Limited

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Quick Facts
Patent No.
US 5,843,319
App. No.
08/902,072
Filed
1997-07-29
Granted
1998-12-01
Kind
A