Granted Patent
Utility
US 5,843,322 · App. 08/779,976
Process for etching N, P, N+ and P+ type slugs and wafers
Inventor:
Thomas C. Chandler, Jr.
Patented Case
View Patent ↗
Granted: Dec 1, 1998
Filed: Dec 23, 1996
Inventor
Thomas C. Chandler, Jr.
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.