Granted Patent
Utility
US 5,844,963 · App. 08/919,836
Electron beam superimposition method and apparatus
Inventors:
Thomas J. Koller, Rajesh Bandari, Jeff Takenaka, Rick Smith
Patented Case
View Patent ↗
Granted: Dec 1, 1998
Filed: Aug 28, 1997
Inventors
Thomas J. Koller
Rajesh Bandari
Jeff Takenaka
Rick Smith
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.