Granted Patent
Utility
US 5,846,327 · App. 08/816,555
Substrate spin treating apparatus
Inventors:
Takanori Kawamoto, Mitsuhiro Fujita
Patented Case
View Patent ↗
Granted: Dec 8, 1998
Filed: Mar 13, 1997
Inventors
Takanori Kawamoto
Mitsuhiro Fujita
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.