Granted Patent
Utility
US 5,846,331 · App. 08/838,533
Plasma processing apparatus
Inventor:
Hidenobu Miyamoto
Patented Case
View Patent ↗
Granted: Dec 8, 1998
Filed: Apr 9, 1997
Inventor
Hidenobu Miyamoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.