Granted Patent
Utility
US 5,846,374 · App. 08/724,848
Gas agitated liquid etcher
Inventors:
Sameer D. Parab, Mark A. Salsbery
Patented Case
View Patent ↗
Granted: Dec 8, 1998
Filed: Oct 3, 1996
Inventors
Sameer D. Parab
Mark A. Salsbery
Assignee (at issue)
Elantec Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.