IP Library Granted Patent US 5,847,366
Granted Patent Utility
US 5,847,366 · App. 08/668,045

Apparatus and method for controlling the temperature of an integrated circuit under test

Inventor: David R. Grunfeld
Patented Case View Patent ↗
Granted: Dec 8, 1998 Filed: Jun 18, 1996
Inventor
David R. Grunfeld
Assignee (at issue)
Intel Corporation

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Quick Facts
Patent No.
US 5,847,366
App. No.
08/668,045
Filed
1996-06-18
Granted
1998-12-08
Kind
A