Granted Patent
Utility
US 5,848,089 · App. 08/893,904
Excimer laser with magnetic bearings supporting fan
Inventors:
Kamal Sarkar, Richard C. Ujazdowski, Palash P. Das, Donald G. Larson
Patented Case
View Patent ↗
Granted: Dec 8, 1998
Filed: Jul 11, 1997
Inventors
Kamal Sarkar
Richard C. Ujazdowski
Palash P. Das
Donald G. Larson
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.