Granted Patent
Utility
US 5,849,162 · App. 08/428,612
Sputtering device and method for reactive for reactive sputtering
Inventors:
Leroy A. Bartolomei, Thomas M. Read, Craig Shevlin
Patented Case
View Patent ↗
Granted: Dec 15, 1998
Filed: Apr 25, 1995
Inventors
Leroy A. Bartolomei
Thomas M. Read
Craig Shevlin
Assignee (at issue)
Deposition Sciences, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.