Granted Patent
Utility
US 5,849,639 · App. 08/979,297
Method for removing etching residues and contaminants
Inventors:
Simon John Molloy, Daniel J. Vitkavage
Patented Case
View Patent ↗
Granted: Dec 15, 1998
Filed: Nov 26, 1997
Inventors
Simon John Molloy
Daniel J. Vitkavage
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.