Granted Patent
Utility
US 5,851,413 · App. 08/667,966
Gas delivery systems for particle beam processing
Inventors:
Robert A. Casella, Charles J. Libby, Gary P. Rathmell
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Jun 19, 1996
Inventors
Robert A. Casella
Charles J. Libby
Gary P. Rathmell
Assignee (at issue)
Micron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.