Granted Patent
Utility
US 5,851,900 · App. 08/848,583
Method of manufacturing a shallow trench isolation for a semiconductor device
Inventors:
Chih-Hsun Chu, Ching-Nan Yang
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Apr 28, 1997
Inventors
Chih-Hsun Chu
Ching-Nan Yang
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.