Granted Patent
Utility
US 5,852,128 · App. 08/922,321
Acid-labile group protected hydroxystyrene polymers or copolymers thereof and their application to radiation sensitive materials
Inventors:
Munirathna Padmanaban, Georg Pawlowski, Yoshiaki Kinoshita, Hiroshi Okazaki, Seiya Masuda, Satoru Funato, Tetsu Yamamoto
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Sep 3, 1997
Inventors
Munirathna Padmanaban
Georg Pawlowski
Yoshiaki Kinoshita
Hiroshi Okazaki
Seiya Masuda
Satoru Funato
Tetsu Yamamoto
Assignee (at issue)
Clariant Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.