Granted Patent
Utility
US 5,852,275 · App. 08/576,236
Heating system, vacuum process chamber comprising such a heating system and operation of such a vacuum process chamber
Inventor:
Hans Signer
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Dec 21, 1995
Inventor
Hans Signer
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.