Granted Patent
Utility
US 5,852,621 · App. 08/897,665
Pulse laser with pulse energy trimmer
Inventor:
Richard L. Sandstrom
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Jul 21, 1997
Inventor
Richard L. Sandstrom
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.