Granted Patent
Utility
US 5,853,471 · App. 08/838,665
Composition for anti-reflection coating
Inventors:
Takeo Yoshida, Hatsuyuki Tanaka
Patented Case
View Patent ↗
Granted: Dec 29, 1998
Filed: Apr 9, 1997
Inventors
Takeo Yoshida
Hatsuyuki Tanaka
Assignee (at issue)
Hoechst Japan Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.