Granted Patent
Utility
US 5,856,053 · App. 08/759,720
Method for estimating optimum position of a wafer for forming image patterns thereon
Inventor:
Akira Watanabe
Patented Case
View Patent ↗
Granted: Jan 5, 1999
Filed: Dec 6, 1996
Inventor
Akira Watanabe
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.