Granted Patent
Utility
US 5,857,893 · App. 08/720,744
Methods and apparatus for measuring and dispensing processing solutions to a CMP machine
Inventors:
Gregory A. Olsen, Carey R. Smith, Wayne Pratt
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: Oct 2, 1996
Inventors
Gregory A. Olsen
Carey R. Smith
Wayne Pratt
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.