Granted Patent
Utility
US 5,858,099 · App. 08/661,210
Electrostatic chucks and a particle deposition apparatus therefor
Inventors:
Hoi-Cheong Steve Sun, Timothy Allen Pletcher
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: Jun 10, 1996
Inventors
Hoi-Cheong Steve Sun
Timothy Allen Pletcher
Assignee (at issue)
Sarnoff Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.