Granted Patent
Utility
US 5,858,813 · App. 08/644,509
Chemical mechanical polishing slurry for metal layers and films
Inventors:
Debra L. Scherber, Vlasta Brusic Kaufman, Rodney Kistler, Brian L. Mueller, Christopher C. Streinz
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: May 10, 1996
Inventors
Debra L. Scherber
Vlasta Brusic Kaufman
Rodney Kistler
Brian L. Mueller
Christopher C. Streinz
Assignee (at issue)
Cabot Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.