Granted Patent
Utility
US 5,858,834 · App. 08/807,692
Method for forming cylindrical capacitor lower plate in semiconductor device
Inventors:
Toshiyuki Hirota, Kiyotaka Sakamoto, Shuji Fujiwara
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: Feb 28, 1997
Inventors
Toshiyuki Hirota
Kiyotaka Sakamoto
Shuji Fujiwara
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.