IP Library › Granted Patent US 5,858,873
Granted Patent Utility
US 5,858,873 · App. 08/816,185

Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture thereof

Inventors: Susan Clay Vitkavage, Daniel J. Vitkavage, Sailesh Mansinh Merchant
Patented Case View Patent ↗
Granted: Jan 12, 1999 Filed: Mar 12, 1997
Inventors
Susan Clay Vitkavage
Daniel J. Vitkavage
Sailesh Mansinh Merchant
Assignee (at issue)
LUCENT TECHNOLOGIES INC.

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Quick Facts
Patent No.
US 5,858,873
App. No.
08/816,185
Filed
1997-03-12
Granted
1999-01-12
Kind
A