Granted Patent
Utility
US 5,858,880 · App. 08/578,660
Method of treating a semi-conductor wafer
Inventors:
Christopher Dobson, Adrian Kiermasz
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: Jan 5, 1996
Inventors
Christopher Dobson
Adrian Kiermasz
Assignee (at issue)
Trikon Equipments Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.