Granted Patent
Utility
US 5,859,784 · App. 08/686,549
Method for impurity distribution simulation
Inventor:
Koichi Sawahata
Patented Case
View Patent ↗
Granted: Jan 12, 1999
Filed: Jul 26, 1996
Inventor
Koichi Sawahata
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.