Granted Patent
Utility
US 5,860,848 · App. 08/758,064
Polishing silicon wafers with improved polishing slurries
Inventors:
Scott B. Loncki, Lee Melbourne Cook, James Shen, Keith G. Pierce
Patented Case
View Patent ↗
Granted: Jan 19, 1999
Filed: Nov 27, 1996
Inventors
Scott B. Loncki
Lee Melbourne Cook
James Shen
Keith G. Pierce
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.