IP Library Granted Patent US 5,861,055
Granted Patent Utility
US 5,861,055 · App. 08/822,078

Polishing composition for CMP operations

Inventors: Derryl D. J. Allman, William J. Crosby, James A. Maiolo
Patented Case View Patent ↗
Granted: Jan 19, 1999 Filed: Mar 20, 1997
Inventors
Derryl D. J. Allman
William J. Crosby
James A. Maiolo
Assignee (at issue)
LSI Logic Corporation

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Quick Facts
Patent No.
US 5,861,055
App. No.
08/822,078
Filed
1997-03-20
Granted
1999-01-19
Kind
A