Granted Patent
Utility
US 5,863,393 · App. 08/964,575
Low angle, low energy physical vapor deposition of alloys
Inventor:
Yongjun Jeff Hu
Patented Case
View Patent ↗
Granted: Jan 26, 1999
Filed: Nov 5, 1997
Inventor
Yongjun Jeff Hu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.