Granted Patent
Utility
US 5,863,705 · App. 08/793,546
Photolithographic pattern generation
Inventors:
Recai Sezi, Rainer Leuschner, Erwin Schmidt
Patented Case
View Patent ↗
Granted: Jan 26, 1999
Filed: Feb 21, 1997
Inventors
Recai Sezi
Rainer Leuschner
Erwin Schmidt
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.