IP Library › Granted Patent US 5,865,670
Granted Patent Utility
US 5,865,670 · App. 08/941,777

Wafer demount apparatus

Inventors: Kenneth A. Frank, Roger Paul Durkee, Francis Richard Bronson, Richard William Heim
Patented Case View Patent ↗
Granted: Feb 2, 1999 Filed: Sep 30, 1997
Inventors
Kenneth A. Frank
Roger Paul Durkee
Francis Richard Bronson
Richard William Heim
Assignee (at issue)
MEMC Electronic Materials, Inc.

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Quick Facts
Patent No.
US 5,865,670
App. No.
08/941,777
Filed
1997-09-30
Granted
1999-02-02
Kind
A