Granted Patent
Utility
US 5,865,969 · App. 08/736,232
Apparatus for, and method of, providing a deposition on a substrate
Inventor:
Peter J. Clarke
Patented Case
View Patent ↗
Granted: Feb 2, 1999
Filed: Oct 23, 1996
Inventor
Peter J. Clarke
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.