IP Library › Granted Patent US 5,867,276
Granted Patent Utility
US 5,867,276 · App. 08/814,736

Method for broad wavelength scatterometry

Inventors: John R. McNeil, Scott Wilson, Richard H. Krukar
Patented Case View Patent ↗
Granted: Feb 2, 1999 Filed: Mar 7, 1997
Inventors
John R. McNeil
Scott Wilson
Richard H. Krukar
Assignee (at issue)
Bio-Rad Laboratories, Inc.

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Quick Facts
Patent No.
US 5,867,276
App. No.
08/814,736
Filed
1997-03-07
Granted
1999-02-02
Kind
A