Granted Patent
Utility
US 5,868,608 · App. 08/696,445
Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
Inventors:
Derryl D. J. Allman, John Gregory
Patented Case
View Patent ↗
Granted: Feb 9, 1999
Filed: Aug 13, 1996
Inventors
Derryl D. J. Allman
John Gregory
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.