Granted Patent
Utility
US 5,869,376 · App. 08/709,603
Production method for semiconductor device having field-shield isolation structure
Inventor:
Yugo Tomioka
Patented Case
View Patent ↗
Granted: Feb 9, 1999
Filed: Sep 9, 1996
Inventor
Yugo Tomioka
Assignee (at issue)
Nippon Steel Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.