IP Library › Granted Patent US 5,870,176
Granted Patent Utility
US 5,870,176 · App. 08/878,444

Maskless lithography

Inventors: William C. Sweatt, Richard H. Stulen
Patented Case View Patent ↗
Granted: Feb 9, 1999 Filed: Jun 18, 1997
Inventors
William C. Sweatt
Richard H. Stulen
Assignee (at issue)
Sandia Corporation

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Quick Facts
Patent No.
US 5,870,176
App. No.
08/878,444
Filed
1997-06-18
Granted
1999-02-09
Kind
A