IP Library › Granted Patent US 5,870,189
Granted Patent Utility
US 5,870,189 · App. 08/837,942

Particle monitor and particle-free recessing system with particle monitor

Inventors: Fumihiko Uesugi, Natsuko Ito
Patented Case View Patent ↗
Granted: Feb 9, 1999 Filed: Apr 28, 1997
Inventors
Fumihiko Uesugi
Natsuko Ito
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,870,189
App. No.
08/837,942
Filed
1997-04-28
Granted
1999-02-09
Kind
A