Granted Patent
Utility
US 5,870,792 · App. 08/829,056
Apparatus for cleaning wafers and discs
Inventor:
Eric Shurtliff
Patented Case
View Patent ↗
Granted: Feb 16, 1999
Filed: Mar 31, 1997
Inventor
Eric Shurtliff
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.