IP Library › Granted Patent US 5,872,044
Granted Patent Utility
US 5,872,044 · App. 08/733,368

Late process method for trench isolation

Inventors: Donald F. Hemmenway, Lawrence G. Pearce
Patented Case View Patent ↗
Granted: Feb 16, 1999 Filed: Oct 17, 1996
Inventors
Donald F. Hemmenway
Lawrence G. Pearce
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 5,872,044
App. No.
08/733,368
Filed
1996-10-17
Granted
1999-02-16
Kind
A