Granted Patent
Utility
US 5,872,633 · App. 08/798,803
Methods and apparatus for detecting removal of thin film layers during planarization
Inventors:
Paul Holzapfel, James C. Schlueter, Chris Karlsrud, Warren Lin
Patented Case
View Patent ↗
Granted: Feb 16, 1999
Filed: Feb 12, 1997
Inventors
Paul Holzapfel
James C. Schlueter
Chris Karlsrud
Warren Lin
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.