Granted Patent
Utility
US 5,874,367 · App. 08/362,429
Method of treating a semi-conductor wafer
Inventor:
Christopher Dobson
Patented Case
View Patent ↗
Granted: Feb 23, 1999
Filed: Dec 28, 1994
Inventor
Christopher Dobson
Assignee (at issue)
Trikon Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.