Granted Patent
Utility
US 5,874,368 · App. 08/942,996
Silicon nitride from bis(tertiarybutylamino)silane
Inventors:
Ravi Laxman, David A. Roberts, Arthur Kenneth Hochberg, Herman Gene Hockenhull, Felicia Diane Kaminsky
Patented Case
View Patent ↗
Granted: Feb 23, 1999
Filed: Oct 2, 1997
Inventors
Ravi Laxman
David A. Roberts
Arthur Kenneth Hochberg
Herman Gene Hockenhull
Felicia Diane Kaminsky
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.