IP Library › Granted Patent US 5,874,734
Granted Patent Utility
US 5,874,734 · App. 08/777,655

Atomic force microscope for measuring properties of dielectric and insulating layers

Inventors: Virgil B. Elings, Dennis M. Adderton, Dror Sarid
Patented Case View Patent ↗
Granted: Feb 23, 1999 Filed: Dec 31, 1996
Inventors
Virgil B. Elings
Dennis M. Adderton
Dror Sarid

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Quick Facts
Patent No.
US 5,874,734
App. No.
08/777,655
Filed
1996-12-31
Granted
1999-02-23
Kind
A