Granted Patent
Utility
US 5,874,739 · App. 08/914,070
Arrangement for shadow-casting lithography
Inventors:
Herbert Buschbeck, Alfred Chalupka, Hans Loeschner, Gerhard Stengl, Herbert Vonach
Patented Case
View Patent ↗
Granted: Feb 23, 1999
Filed: Aug 18, 1997
Inventors
Herbert Buschbeck
Alfred Chalupka
Hans Loeschner
Gerhard Stengl
Herbert Vonach
Assignee (at issue)
IMS-Ionen Mikrofabrikationas Systeme
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.