Granted Patent
Utility
US 5,876,269 · App. 08/964,988
Apparatus and method for polishing semiconductor device
Inventor:
Kouji Torii
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Nov 5, 1997
Inventor
Kouji Torii
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.