Granted Patent
Utility
US 5,876,490 · App. 08/789,229
Polish process and slurry for planarization
Inventor:
Maria Ronay
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Jan 24, 1997
Inventor
Maria Ronay
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.