IP Library Granted Patent US 5,876,897
Granted Patent Utility
US 5,876,897 · App. 08/812,542

Positive photoresists containing novel photoactive compounds

Inventors: Dana L. Durham, Ping-Hung Lu, Joseph E. Oberlander, Dinesh N. Khanna
Patented Case View Patent ↗
Granted: Mar 2, 1999 Filed: Mar 7, 1997
Inventors
Dana L. Durham
Ping-Hung Lu
Joseph E. Oberlander
Dinesh N. Khanna
Assignee (at issue)
Clariant Finance (BVI) Limited

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Quick Facts
Patent No.
US 5,876,897
App. No.
08/812,542
Filed
1997-03-07
Granted
1999-03-02
Kind
A