Granted Patent
Utility
US 5,876,902 · App. 08/789,247
Raster shaped beam writing strategy system and method for pattern generation
Inventors:
Lee H. Veneklasen, William J. DeVore, R. L. Smith, Robin L. Teitzel
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Jan 28, 1997
Inventors
Lee H. Veneklasen
William J. DeVore
R. L. Smith
Robin L. Teitzel
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.