Granted Patent
Utility
US 5,877,035 · App. 08/600,141
Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same
Inventors:
Naohiko Fujino, Isamu Karino, Masashi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Feb 12, 1996
Inventors
Naohiko Fujino
Isamu Karino
Masashi Ohmori
Masatoshi Yasutake
Shigeru Wakiyama
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.