Granted Patent
Utility
US 5,877,036 · App. 08/806,983
Overlay measuring method using correlation function
Inventor:
Kenji Kawai
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Feb 26, 1997
Inventor
Kenji Kawai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.