Granted Patent
Utility
US 5,877,063 · App. 08/502,906
Method of forming rough polysilicon surfaces
Inventor:
Robin Lee Gilchrist
Patented Case
View Patent ↗
Granted: Mar 2, 1999
Filed: Jul 17, 1995
Inventor
Robin Lee Gilchrist
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.